Home / Standards / GB/T 40109-2021 GB/T 40109-2021 Active Surface chemical analysis—Secondary-ion mass spectrometry—Method for depth profiling of boron in silicon 表面化学分析 二次离子质谱 硅中硼深度剖析方法 Standard Type GBT ICS 71.040.40 CCS G04 Status 现行 Issue Date 2021-05-21 Implementation 2021-12-01 Responsible Dept 中国科学院 Drafting Unit N/A