GB/T 39159-2020

Active

High purity copper alloy target for integrated circuit

集成电路用高纯铜合金靶材

Standard Type
GBT
ICS
77.150.30
CCS
H62
Status
现行
Issue Date
2020-11-19
Implementation
2021-10-01
Responsible Dept
中国有色金属工业协会
Drafting Unit
N/A