GB/T 39145-2020

Active

Test method for the content of surface metal elements on silicon wafers—Inductively coupled plasma mass spectrometry

硅片表面金属元素含量的测定 电感耦合等离子体质谱法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2020-10-11
Implementation
2021-09-01
Responsible Dept
国家标准委
Drafting Unit
N/A