GB/T 38616-2020

Active

Terminology for nano positioning and scaning stage

纳米定位与扫描平台术语

Standard Type
GBT
ICS
01.040.39
CCS
N10
Status
现行
Issue Date
2020-04-28
Implementation
2020-11-01
Responsible Dept
工业和信息化部（电子）
Drafting Unit
N/A