GB/T 38614-2020

Active

Measuring method for nano positioning and scanning stage based on flexible hinge mechanism and piezo actuator

基于柔性铰链机构和压电陶瓷驱动器的纳米定位与扫描平台测量方法

Standard Type
GBT
ICS
01.040.39
CCS
N10
Status
现行
Issue Date
2020-04-28
Implementation
2020-11-01
Responsible Dept
工业和信息化部（电子）
Drafting Unit
N/A