GB/T 38447-2020

Active

Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration

微机电系统（MEMS）技术 MEMS结构共振疲劳试验方法

Standard Type
GBT
ICS
31.200
CCS
L55
Status
现行
Issue Date
2020-03-06
Implementation
2020-07-01
Responsible Dept
国家标准委
Drafting Unit
N/A