GB/T 37959-2019

Active

Information model for containing process chamber IC equipment design

含工艺腔室类集成电路装备设计信息模型

Standard Type
GBT
ICS
35.240.50
CCS
J07
Status
现行
Issue Date
2019-08-30
Implementation
2020-03-01
Responsible Dept
中国机械工业联合会
Drafting Unit
N/A