GB/T 37466-2019

Active

Laser lift-off equipment used for GaN

氮化镓激光剥离设备

Standard Type
GBT
ICS
31-550
CCS
L95
Status
现行
Issue Date
2019-06-04
Implementation
2019-10-01
Responsible Dept
国家标准委
Drafting Unit
N/A