GB/T 37049-2018

Active

Test method for the content of metal impurity in electronic grade polysilicon—Inductively coupled-plasma mass spectrometry method

电子级多晶硅中基体金属杂质含量的测定 电感耦合等离子体质谱法

Standard Type
GBT
ICS
77.040.30
CCS
H17
Status
现行
Issue Date
2018-12-28
Implementation
2019-04-01
Responsible Dept
国家标准委
Drafting Unit
N/A