GB/T 36646-2018

Active

Equipment for preparation of nitride semiconductor materials by hydride vapor phase epitaxy

制备氮化物半导体材料用氢化物气相外延设备

Standard Type
GBT
ICS
31.220
CCS
L95
Status
现行
Issue Date
2018-09-17
Implementation
2019-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A