GB/T 35306-2023

Active

Determination of carbon and oxygen content in single crystal silicon—Low temperature fourier transform infrared spectrometry method

硅单晶中碳、氧含量的测定 低温傅立叶变换红外光谱法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2023-08-06
Implementation
2024-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A