GB/T 34971-2017

Active

Guide for gaseous effluent handling in semiconductor industry

半导体制造用气体处理指南

Standard Type
GBT
ICS
71.040.40
CCS
G86
Status
现行
Issue Date
2017-11-01
Implementation
2018-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A