GB/T 34899-2017

Active

Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy

微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法

Standard Type
GBT
ICS
31.200
CCS
L55
Status
现行
Issue Date
2017-11-01
Implementation
2018-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A