GB/T 34898-2017

Active

Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element

微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法

Standard Type
GBT
ICS
31.200
CCS
L55
Status
现行
Issue Date
2017-11-01
Implementation
2018-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A