GB/T 34893-2017

Active

Micro-electromechanical system technology—Measuring method for in-plane length measurements of MEMS microstructures using an optical interferometer

微机电系统（MEMS）技术基于光学干涉的MEMS微结构面内长度测量方法

Standard Type

GBT

ICS

31.200

CCS

L55

Status

现行

Issue Date

2017-11-01

Implementation

2018-05-01

Responsible Dept

国家标准委

Drafting Unit

N/A