GB/T 34504-2017

Abolished

Measurement method for surface metal contamination on sapphire polished substrate wafer

蓝宝石抛光衬底片表面残留金属元素测量方法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
废止
Issue Date
2017-10-14
Implementation
2018-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A