GB/T 34481-2017

Active

Test method for measuring etch pit density (EPD) in low dislocation density monocrystalline germanium slices

低位错密度锗单晶片腐蚀坑密度(EPD)的测量方法

Standard Type
GBT
ICS
77.040
CCS
H25
Status
现行
Issue Date
2017-10-14
Implementation
2018-07-01
Responsible Dept
国家标准委
Drafting Unit
N/A