GB/T 34326-2026

Upcoming

Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

表面化学分析深度剖析 AES和XPS深度剖析时离子束对准方法及其束流或束流密度的测量方法

Standard Type

GBT

ICS

71.040.40

CCS

G04

Status

即将实施

Issue Date

2026-01-28

Implementation

2026-08-01

Responsible Dept

中国科学院

Drafting Unit

N/A