GB/T 34326-2017

Active

Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

表面化学分析 深度剖析 AES和XPS深度剖析时离子束对准方法及其束流或束流密度测量方法

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
现行
Issue Date
2017-09-29
Implementation
2018-08-01
Responsible Dept
中国科学院
Drafting Unit
N/A