GB/T 34177-2017

Active

Quartz glass wafer for lithography

光刻用石英玻璃晶圆

Standard Type
GBT
ICS
81.040.30
CCS
Q35
Status
现行
Issue Date
2017-09-07
Implementation
2018-08-01
Responsible Dept
中国建筑材料联合会
Drafting Unit
N/A