GB/T 33826-2017

Active

Measurement of nanofilm thickness on glass substrate—Profilometric method

玻璃衬底上纳米薄膜厚度测量 触针式轮廓仪法

Standard Type
GBT
ICS
71.040.99
CCS
Q34
Status
现行
Issue Date
2017-05-31
Implementation
2017-12-01
Responsible Dept
中国科学院
Drafting Unit
N/A