GB/T 33523.603-2022

Active

Geometrical product specifications (GPS)—Surface texture: Areal—Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

产品几何技术规范（GPS）表面结构区域法第603部分：非接触（相移干涉显微）式仪器的标称特性

Standard Type

GBT

ICS

17.040.20

CCS

J04

Status

现行

Issue Date

2022-12-30

Implementation

2023-04-01

Responsible Dept

国家标准委

Drafting Unit

N/A