GB/T 32999-2016

Active

Surface chemical analysis—Depth profiling—Measurement of sputtering rate: mesh-replica method using a mechanical stylus profilometer

表面化学分析 深度剖析 用机械轮廓仪栅网复型法测量溅射速率

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
现行
Issue Date
2016-10-13
Implementation
2017-09-01
Responsible Dept
中国科学院
Drafting Unit
N/A