GB/T 32817-2016

Active

Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS

半导体器件 微机电器件 MEMS总规范

Standard Type
GBT
ICS
31.080.99
CCS
L55
Status
现行
Issue Date
2016-08-29
Implementation
2017-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A