GB/T 32816-2016

Active

Silicon-based MEMS fabrication technology—Specification for criterion of the combination of the deep etching and bonding process

硅基MEMS制造技术以深刻蚀与键合为核心的工艺集成规范

Standard Type

GBT

ICS

31.200

CCS

L55

Status

现行

Issue Date

2016-08-29

Implementation

2017-03-01

Responsible Dept

国家标准委

Drafting Unit

N/A