GB/T 32815-2016

Active

Silicon-based MEMS fabrication technology—Specification for criterion of the bulk silicon piezoresistance process

硅基MEMS制造技术 体硅压阻加工工艺规范

Standard Type
GBT
ICS
31.200
CCS
L55
Status
现行
Issue Date
2016-08-29
Implementation
2017-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A