GB/T 32814-2016

Active

Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process

硅基MEMS制造技术基于SOI硅片的MEMS工艺规范

Standard Type

GBT

ICS

31.200

CCS

L55

Status

现行

Issue Date

2016-08-29

Implementation

2017-03-01

Responsible Dept

国家标准委

Drafting Unit

N/A