GB/T 32495-2016

Active

Surface chemical analysis—Secondary-ion mass spectrometry—Method for depth profiling of arsenic in silicon

表面化学分析二次离子质谱硅中砷的深度剖析方法

Standard Type

GBT

ICS

71.040.40

CCS

G04

Status

现行

Issue Date

2016-02-24

Implementation

2017-01-01

Responsible Dept

中国科学院

Drafting Unit

N/A