GB/T 32281-2015

Active

Test method for measuring oxygen, carbon, boron and phosphorus in solar silicon wafers and feedstock by secondary ion mass spectrometry

太阳能级硅片和硅料中氧、碳、硼和磷量的测定 二次离子质谱法

Standard Type
GBT
ICS
77.040.30
CCS
H17
Status
现行
Issue Date
2015-12-10
Implementation
2017-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A