GB/T 32280-2022

Active

Test method for warp and bow of silicon wafers—Automated non-contact scanning method

硅片翘曲度和弯曲度的测试 自动非接触扫描法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2022-03-09
Implementation
2022-10-01
Responsible Dept
国家标准委
Drafting Unit
N/A