GB/T 32280-2015

Abolished

Test method for warp of silicon wafers—Automated non-contact scanning method

硅片翘曲度测试 自动非接触扫描法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
废止
Issue Date
2015-12-10
Implementation
2017-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A