GB/T 32278-2025

Active

Test method for thickness and fltaness of monocrystalline silicon carbide wafers

碳化硅单晶片厚度和平整度测试方法

Standard Type
GBT
ICS
77.040
CCS
H 21
Status
现行
Issue Date
2025-08-01
Implementation
2026-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A