GB/T 32278-2015

Abolished

Test methods for flatness of monocrystalline silicon carbide wafers

碳化硅单晶片平整度测试方法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
废止
Issue Date
2015-12-10
Implementation
2017-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A