GB/T 32189-2015

Active

Test method for surface roughness of GaN single crystal substrate by atomic force microscope

氮化镓单晶衬底表面粗糙度的原子力显微镜检验法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2015-12-10
Implementation
2016-11-01
Responsible Dept
国家标准委
Drafting Unit
N/A