GB/T 31987-2026
UpcomingElectronic gas—Germane
电子气体 锗烷
Application Summary AI generated
GB/T 31987-2026 specifies the technical requirements, test methods, inspection rules, and packaging, marking, storage, and transportation conditions for germane (GeH₄) used as an electronic specialty gas. It is applied in the semiconductor and optoelectronic industries, particularly for chemical vapor deposition (CVD) processes to produce germanium-containing thin films in integrated circuits and solar cells. The standard ensures purity and safety compliance for germane in high-tech manufacturing and quality control testing environments.
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Content extracted by AI. Not officially verified.