GB/T 31351-2014

Abolished

Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers

碳化硅单晶抛光片微管密度无损检测方法

Standard Type
GBT
ICS
77.040.99
CCS
H26
Status
废止
Issue Date
2014-12-31
Implementation
2015-09-01
Responsible Dept
国家标准委
Drafting Unit
N/A