GB/T 31227-2014

Active

Test method for the surface roughness by atomic force microscope for sputtered thin films

原子力显微镜测量溅射薄膜表面粗糙度的方法

Standard Type
GBT
ICS
17.040.20
CCS
J04
Status
现行
Issue Date
2014-09-30
Implementation
2015-04-15
Responsible Dept
中国科学院
Drafting Unit
N/A