GB/T 31225-2014

Active

Test method for the thickness of silicon oxide on Si substrate by ellipsometer

椭圆偏振仪测量硅表面上二氧化硅薄层厚度的方法

Standard Type
GBT
ICS
17.040.01
CCS
J04
Status
现行
Issue Date
2014-09-30
Implementation
2015-04-15
Responsible Dept
中国科学院
Drafting Unit
N/A