GB/T 30868-2014

Abolished

Test method for measuring micropipe density of monocrystalline silicon carbide wafers―Chemically etching

碳化硅单晶片微管密度的测定化学腐蚀法

Standard Type

GBT

ICS

29.045

CCS

H83

Status

废止

Issue Date

2014-07-24

Implementation

2015-02-01

Responsible Dept

国家标准委

Drafting Unit

N/A