GB/T 30867-2014

Abolished

Test method for measuring thickness and total thickness variation of monocrystalline silicon carbide wafers

碳化硅单晶片厚度和总厚度变化测试方法

Standard Type
GBT
ICS
29.045
CCS
H83
Status
废止
Issue Date
2014-07-24
Implementation
2015-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A