GB/T 30701-2014

Active

Surface chemical analysis―Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy

表面化学分析 硅片工作标准样品表面元素的化学收集方法和全反射X射线荧光光谱法(TXRF)测定

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
现行
Issue Date
2014-03-27
Implementation
2014-12-01
Responsible Dept
中国科学院
Drafting Unit
N/A