GB/T 30652-2023

Active

Trichlorosilane for silicon epitaxial

硅外延用三氯氢硅

Standard Type
GBT
ICS
29.045
CCS
H83
Status
现行
Issue Date
2023-08-06
Implementation
2024-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A