GB/T 30652-2014

Abolished

Trichlorosilane for silicon epitaxial

硅外延用三氯氢硅

Standard Type
GBT
ICS
29.045
CCS
H83
Status
废止
Issue Date
2014-12-31
Implementation
2015-09-01
Responsible Dept
国家标准委
Drafting Unit
N/A