Home / Standards / GB/T 30116-2013 GB/T 30116-2013 Active Requirements for semiconductor manufacturing facility electromagnetic compatibility 半导体生产设施电磁兼容性要求 Standard Type GBT ICS N/A CCS L95 Status 现行 Issue Date 2013-12-17 Implementation 2014-04-15 Responsible Dept 国家标准委 Drafting Unit N/A