GB/T 29844-2013

Active

Specifications of metrology patterns for the evaluation of advanced photolithgraphy

用于先进集成电路光刻工艺综合评估的图形规范

Standard Type
GBT
ICS
31.030
CCS
L90
Status
现行
Issue Date
2013-11-12
Implementation
2014-04-15
Responsible Dept
国家标准委
Drafting Unit
N/A