GB/T 29658-2013

Active

High-Purity sputtering aluminium and aluminium alloy target used in electronic film

电子薄膜用高纯铝及铝合金溅射靶材

Standard Type
GBT
ICS
77.120.10
CCS
H61
Status
现行
Issue Date
2013-09-06
Implementation
2014-05-01
Responsible Dept
中国有色金属工业协会
Drafting Unit
N/A