GB/T 29507-2013

Active

Test method for measuring flatness, thickness and total thickness variation on silicon wafers by automated non-contact scanning

硅片平整度、厚度及总厚度变化测试 自动非接触扫描法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2013-05-09
Implementation
2014-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A