GB/T 29506-2013

Active

300mm polished monocrystalline silicon wafers

300mm 硅单晶抛光片

Standard Type
GBT
ICS
29.045
CCS
H82
Status
现行
Issue Date
2013-05-09
Implementation
2014-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A