GB/T 29505-2013

Active

Test method for measuring surface roughness on planar surfaces of silicon wafer

硅片平坦表面的表面粗糙度测量方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2013-05-09
Implementation
2014-02-01
Responsible Dept
国家标准委
Drafting Unit
N/A