GB/T 29056-2025

Active

Determination of impurity content in trichlorosilane for silicon epitaxy—Inductively coupled plasma mass spectrometry

硅外延用三氯氢硅中杂质含量的测定 电感耦合等离子体质谱法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2025-10-31
Implementation
2026-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A